真空室體
Vacuum chamber |
Ø1300*1450mm，SUS304材質(zhì)
φ1,300*1,450mm，SUS304 material |
排氣系統(tǒng)
Air exhaust system |
KT-500擴(kuò)散泵2臺(tái)，總排氣速率（加載水冷阱）11,000Pa.L/S
Two sets of KT-500 diffusion pump, with a gross exhaust velocity (loaded with water-cooling trap) of 11,000Pa.L/S; |
極限真空≤2.0E-4Pa；排氣時(shí)間≤15min(大氣→4.0E-3Pa)
Ultimate vacuum ≤2.0E-4Pa; exhaust time ≤15min (atmosphere→4.0E-3Pa) |
基片架
Substrate holder |
Ø1200四葉扇形基片架， 3～30rpm轉(zhuǎn)速；可選配行星基片架、翻轉(zhuǎn)機(jī)構(gòu)等
φ1200 four-blade sector-shaped substrate holder, rotating speed 3～30rpm; a planet substrate holder or a turnover mechanism can also be matched; |
加熱機(jī)構(gòu)
Heating means |
******350℃，PID控制；恒溫20min后溫度均勻性250±10℃
Maximum 350℃, PID control; temperature homogeneity being 250±10℃ after 20 min of constant temperature control; |
石英監(jiān)控儀
Quartz monitor |
進(jìn)口石英晶體膜厚監(jiān)控儀；2點(diǎn)（或6點(diǎn)）晶振探頭
Imported quartz crystal monitor on film depth, with two-point (or six-point) crystal probe; |
電子束蒸發(fā)源
Electron beam evaporation source |
10KW電子槍 2臺(tái)，12點(diǎn)坩堝和環(huán)形坩堝
Two sets of 10KW electron gun, 12-point crucible or ring-shaped crucible; |
電阻蒸發(fā)源
Resistance evaporation source |
功率4KW（一對(duì)、兩對(duì)或多對(duì)）
Power of 4KW (one pair, two pairs or more pairs) |
膜厚修正板
Film depth correction board |
2個(gè)自動(dòng)可倒式膜厚修正機(jī)構(gòu)
Two automatic film depth correction mechanisms of collapsible type |
反應(yīng)氣體
Reaction gas |
APC自動(dòng)壓強(qiáng)控制儀，質(zhì)量流量計(jì)
APC automatic pressure controller, mass flowmeter |
離子源
Ion source |
可選配Kafman、Holl或RF離子源
Available for matching of Kafman, Holl or RF ion source |
低溫抽氣裝置
Low temperature evacuating equipment |
進(jìn)口低溫抽氣裝置有效捕集水蒸汽，******溫度－130℃
The imported low-temperature evacuating equipment can effectively gather water vapor; minimum temperature -130℃ |
RCS系統(tǒng)
RCS system |
基于WINDOWS的全自動(dòng)鍍膜軟件
Windows-based full automatic coating software |
控制系統(tǒng)
Control system |
控制柜（液晶觸摸式彩色顯示器），遠(yuǎn)程控制遙控盒
Control cabinet (with liquid crystal color touch screen), remote-control box for remote control |
消耗能源
Energy consumption |
3相，220/380VAC,50Hz；～70KVA
Three-phase, 220/380VAC,50Hz；～70KVA |
水流量140L/min，壓力0.3~0.5MPa
Water flow 140L/min, pressure 0.3~0.5MPa |
壓縮空氣0.5MPa~0.7MPa
Compressed air 0.5MPa~0.7MPa |
重 量
Weight |
凈重約4500Kg
Net weight about 4,500 Kg |
安裝空間
Installation space |
W4000mmxD6000mmxH2700mm
W4,000mm×D6,000mm×H2,700mm |
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