型號 Model |
FF-250/1600 |
FF-160/620 |
******工作壓力Minimum operational pressure(Pa) |
<1×10-6 |
<6×10-7 |
抽氣速率(對空氣)Pumping speed for air(L/s) |
1700 |
600 |
壓縮比Compression ratio |
對氮?dú)?For N2 |
>108 |
>109 |
對氫氣 For H2 |
>5×103 |
>6×103 |
進(jìn)氣口法蘭Inlet flange |
LF250(DN250 IS0-K) |
DN160CF |
排氣口法蘭Outlet flange |
KF50(DN50 IS0-KF) |
KF40 |
啟動時間Starting time(min) |
≤8 |
≤5 |
額定轉(zhuǎn)速Rated rotational speed (r/min) |
27000 |
27000 |
振動值Libration value(μm) |
≤0.1 |
≤0.1 |
注油量Oiling capacity (ml) |
210 |
210 |
推薦前級泵Recommended forevacuum pump |
2XZ-15D(15L/s) |
2XZ-4B/2XZ-8D(4-8L/s) |
軸承Bearing |
精密陶瓷球軸承
Precision ceramic balls bearing |
精密陶瓷球軸承
Precision ceramic balls bearing |
安裝方式Operational orientation |
豎直Vertical(±5°) |
豎直Vertical(±5°) |
冷卻方式Cooling method |
水冷 Water cooling |
水冷 Water cooling |
冷卻水溫度Cooling water temperature(℃) |
≤25 |
≤25 |
冷卻水壓力Cooling water pressure(MPa) |
0.196 |
0.196 |
泵體烘烤溫度Pump body baking temperature(℃) |
≤100 |
≤100 |
環(huán)境溫度Environment temperature(℃) |
5~40 |
5~40 |
重量Weight(Kg) |
47 |
30 |